Figure3

Figure 3. Examples of the MEMS-based actuation. (A) Image and scale of a microrobot that utilizes a SDA^[45]; (B) Design of remote electromagnetic actuation system^[46]; (C) Design and scale of microrobot utilizing an electromagnetic motor to power a leg mechanism^[47]; (D) Image of elastomer jumping mechanism^[48]. MEMS: Micro-electromechanical system; SDA: scratch-drive actuator.