Figure2

Figure 2. Examples of the MEMS-based sensors. (A) Image and scale of RoboBee microrobot^[28]; (B) Image and scale of HAMR microrobot with components labeled^[2]; (C) Design of a microrobot with AFM-based force microsensor^[29]; (D) Image and scale of microforce-sensing mobile microrobot^[30]. MEMS: Micro-electromechanical system; HAMR: Harvard Ambulatory MicroRobot; AFM: atomic force microscope.