Figure1

MEMS microrobots: components, applications, design challenges and perspectives

Figure 1. Microrobots are composed of several key components that enable their functionality: Microfabrication materials techniques allow the precise construction of microrobot structures at microscopic scales, providing the framework and intricate design necessary for operation; Sensing enables the microrobot to perceive its environment through detecting physical signals such as pressure, light, or chemicals, which inform its actions; Actuation translates these sensory inputs into movement, allowing the microrobot to perform tasks such as swimming, crawling, or gripping; and Powering supplies the necessary energy to drive the microrobot, often through micro-batteries, WPT, or chemical energy. WPT: Wireless power transfer.

Intelligence & Robotics
ISSN 2770-3541 (Online)

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