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Figure 2. Morphology and elemental analysis characterization of diamond/NdFeB composite films. (A-C) Schematic diagrams of film growth for SD, SDNT2 and SDTNT2 samples, (D-F) Surface SEM of the corresponding samples, (G-I) AFM of the corresponding samples, (J) Cross-sectional SEM of the SD sample, (K and L) EDS elemental analysis of SDNT2 and SDTNT2 samples. SD: Si/diamond; SDNT: Si/diamond/NFB/Ta; SDTNT: Si/diamond/Ta/NFB/Ta; SEM: scanning electron microscope; AFM: atomic force microscope; EDS: energy-dispersive X-ray spectroscopy.